SERVICES
Silicon nitride technology
Silicon nitride (Si3N4) is a dielectric material used in photonic integrated circuits (PIC) because of its broadband transparency from visible light (~450 nm) to mid infrared (~4 µm) [1].
The low absorption loss makes Si3N4 an excellent material for PIC with ultralow loss. An index contrast with silicon oxide (SiO2) of ∆n≈0.5 allows sufficiently strong confinement in Si3N4 waveguide to allow small bending radius and dense PIC. The Kerr nonlinearities and the lack of two-photon absorption makes silicon nitride excellent for nonlinear optic element, such as microcavities for the generation of frequency combs.
[1] Muñoz, P.; Micó, G.; Bru, L.A.; Pastor, D.; Pérez, D.; Doménech, J.D.; Fernández, J.; Baños, R.; Gargallo, B.; Alemany, R.; Sánchez, A.M.; Cirera, J.M.; Mas, R.; Domínguez, C. Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors 2017, 17, 2088
Our Expertise
Ultralow loss silicon nitride is fabricated in Iloomina with a carefully optimized subtractive manufacturing process, which is compatible with general CMOS guidelines. We can fabricate waveguides with ultrasmooth sidewall roughness and ultralow loss in our cleanroom facility.
Ready-Made Chips
Soon available, microring resonators are small optical cavities that can be used for multiple applications, such as tunable optical filters, sensors, and modulators. Furthermore, our chips can be made with high optical confinement, which is suitable for studying Kerr non-linear dynamics.
Based on our experience in designing ultra-low loss silicon nitride cavities, we offer ready-made chips with ring resonators with a free spectral range of 100GHz and a wavelength of 1550nm.
